Invention Grant
- Patent Title: Position measuring device
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Application No.: US15212943Application Date: 2016-07-18
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Publication No.: US10260909B2Publication Date: 2019-04-16
- Inventor: Elmar Mayer
- Applicant: DR. JOHANNES HEIDENHAIN GmbH
- Applicant Address: DE Traunreut
- Assignee: DR. JOHANNES HEIDENHAIN GMBH
- Current Assignee: DR. JOHANNES HEIDENHAIN GMBH
- Current Assignee Address: DE Traunreut
- Agency: Hunton Andrews Kurth LLP
- Priority: EP15179014 20150730
- Main IPC: G01D5/26
- IPC: G01D5/26 ; G01D5/347 ; H02S40/44 ; H01L31/0203

Abstract:
A position measuring device includes a measuring standard and a scanning unit, which are arranged in a manner that allows them to move relative to each other in a measuring direction. The measuring standard includes a graduation, which is scannable by the scanning unit in order to generate positional signals. The scanning unit includes an illumination unit and a detector unit for generating positional signals, the illumination unit being able to emit light in the direction of the graduation and the detector unit being able to detect light modulated by the graduation. The detector unit includes a circuit board and a sensor unit, which is arranged as a semiconductor chip. At least two photodetectors are provided on a front side of the sensor unit facing the graduation, and the electrical connections of the sensor unit are routed to contact surfaces on its rear side by metallic vias. The sensor unit is connected via the contact surfaces to corresponding contact surfaces on the circuit board.
Public/Granted literature
- US20170030743A1 POSITION MEASURING DEVICE Public/Granted day:2017-02-02
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