Invention Grant
- Patent Title: Chromatic confocal distance sensor
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Application No.: US15284983Application Date: 2016-10-04
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Publication No.: US10260941B2Publication Date: 2019-04-16
- Inventor: David Marsaut , Martin Schönleber
- Applicant: PRECITEC OPTRONIK GMBH
- Applicant Address: DE Neu-Isenburg
- Assignee: PRECITEC OPTRONIK GMBH
- Current Assignee: PRECITEC OPTRONIK GMBH
- Current Assignee Address: DE Neu-Isenburg
- Agency: Lucas & Mercanti, LLP
- Agent Klaus P. Stoffel
- Main IPC: G01J3/02
- IPC: G01J3/02 ; G01B11/00 ; G01B11/02

Abstract:
A chromatic confocal distance sensor has a housing in which a polychromatic light source, imaging optics having a longitudinal chromatic aberration, a spectrometer and a planar beam splitter surface are arranged. These lie in the light path of the measurement light between the light source and the imaging optics and between the imaging optics and the spectrometer. A first diaphragm is arranged in the light path between the light source and the beam splitter surface, and a second diaphragm is arranged in the light path between the beam splitter surface and the spectrometer. The diaphragms are arranged mirror-symmetrically with respect to the beam splitter surface. The measurement light propagates as a free beam inside the housing. The beam splitter surface, the first diaphragm and the second diaphragm are fastened together on a carrier which has an isotropic thermal expansion coefficient. This way, temperature changes cannot significantly affect the measurement accuracy.
Public/Granted literature
- US20180094975A1 CHROMATIC CONFOCAL DISTANCE SENSOR Public/Granted day:2018-04-05
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