Invention Grant
- Patent Title: Pressure sensor having sense elements in multiple wheatstone bridges with chained outputs
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Application No.: US15424994Application Date: 2017-02-06
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Publication No.: US10260981B2Publication Date: 2019-04-16
- Inventor: Paige M. Holm , Mark Edward Schlarmann
- Applicant: NXP USA, INC.
- Applicant Address: US TX Austin
- Assignee: NXP USA, Inc.
- Current Assignee: NXP USA, Inc.
- Current Assignee Address: US TX Austin
- Agent Charlene R. Jacobsen
- Main IPC: G01L19/14
- IPC: G01L19/14 ; G01L9/00 ; G01L9/06

Abstract:
A pressure sensor includes a diaphragm suspended across a cavity in a substrate. A first group of piezoresistors is provided in the diaphragm, the piezoresistors of the first group being coupled to one another to form a first Wheatstone bridge having first positive and negative output nodes. A second group of piezoresistors is provided in the diaphragm, the piezoresistors of the second group being coupled to one another to form a second Wheatstone bridge having second positive and negative output nodes. The first negative output node of the first Wheatstone bridge is electrically connected to the second positive output node of the second Wheatstone bridge to directly chain the outputs of the Wheatstone bridges. The first and second Wheatstone bridges each produce an output signal as a function of an external pressure stimulus that is combined via the chained arrangement of the Wheatstone bridges to produce a composite output signal.
Public/Granted literature
- US20180224348A1 PRESSURE SENSOR HAVING SENSE ELEMENTS IN MULTIPLE WHEATSTONE BRIDGES WITH CHAINED OUTPUTS Public/Granted day:2018-08-09
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