Invention Grant
- Patent Title: Inspection device
-
Application No.: US15569503Application Date: 2015-05-26
-
Publication No.: US10261027B2Publication Date: 2019-04-16
- Inventor: Yoshio Kimoto , Akira Hamamatsu
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- International Application: PCT/JP2015/065064 WO 20150526
- International Announcement: WO2016/189650 WO 20161201
- Main IPC: G01N21/47
- IPC: G01N21/47 ; G01N21/88 ; G01N21/95

Abstract:
Proposed is an inspection device that is provided with: an illuminating optical unit that irradiates a discretionary region of a sample with light; a control unit that gives instructions to the illuminating optical unit; and at least one detection unit that detects light transmitted from the sample. The illuminating optical unit includes a light source unit that generates light, and an electrooptic element unit to which the light generated by the light source unit is inputted, and on the basis of the instructions given from the control unit, the electrooptic element unit adjusts the light to be in a desired polarization state, said light having been generated by the light source unit, and irradiates the sample with the light.
Public/Granted literature
- US20180088055A1 Inspection Device Public/Granted day:2018-03-29
Information query