- Patent Title: Electro-optic device, electro-optic unit, and electronic apparatus
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Application No.: US15905057Application Date: 2018-02-26
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Publication No.: US10261311B2Publication Date: 2019-04-16
- Inventor: Suguru Uchiyama , Kosuke Takahashi
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2016-065205 20160329
- Main IPC: G02B26/08
- IPC: G02B26/08 ; H01L23/04 ; H01L23/31 ; H01L23/467 ; H01L23/498 ; H01L23/00 ; B81B7/00 ; G02B7/18

Abstract:
An electro-optic device includes a chip provided with a mirror and a drive element adapted to drive the mirror, a light-transmitting cover adapted to cover the mirror in a planar view, and a spacer having contact with one surface of the chip between the cover and the chip. The entire part of one surface of the chip having contact with the spacer is made of a first material such as silicon oxide film having first thermal conductivity, and the spacer is made of a second material such as a quartz crystal having second thermal conductivity higher than the first thermal conductivity. The cover is made of a third material such as sapphire having third thermal conductivity higher than the second thermal conductivity.
Public/Granted literature
- US20180188524A1 ELECTRO-OPTIC DEVICE, ELECTRO-OPTIC UNIT, AND ELECTRONIC APPARATUS Public/Granted day:2018-07-05
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