Invention Grant
- Patent Title: Categorized stitching guidance for triple-patterning technology
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Application No.: US15669502Application Date: 2017-08-04
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Publication No.: US10261412B2Publication Date: 2019-04-16
- Inventor: Soo Han Choi , Srini Arikati , Erdem Cilingir
- Applicant: Synopsys, Inc.
- Applicant Address: US CA Mountain View
- Assignee: Synopsys, Inc.
- Current Assignee: Synopsys, Inc.
- Current Assignee Address: US CA Mountain View
- Agency: Alston & Bird LLP
- Main IPC: G06F17/00
- IPC: G06F17/00 ; G03F1/70 ; G06F17/50 ; G03F7/20 ; G03F1/00

Abstract:
A method for making a multitude of masks for manufacturing an integrated circuit includes receiving the integrated circuit design printable using a multiple-patterning process. The design includes shapes and at least one layout conflict preventing decomposition of the design into the multitude of masks. The method further includes forming a subset of the shapes including the shapes associated with the at least one layout conflict. The method further includes categorizing the shapes of the subset into one of a multitude of topology types, generating stitch candidate solutions for the multitude of topology types, and decomposing the design into a multitude of masks. The subset of the multitude of shapes is formed by generating a first graph representative of the design, decomposing the first graph into at least three colors to form a colored graph; and identifying within the first graph, a second graph including at least one conflict edge.
Public/Granted literature
- US20170336707A1 CATEGORIZED STITCHING GUIDANCE FOR TRIPLE-PATTERNING TECHNOLOGY Public/Granted day:2017-11-23
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