Invention Grant
- Patent Title: Photocurable composition for imprints, pattern forming method, and method for manufacturing device
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Application No.: US15622474Application Date: 2017-06-14
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Publication No.: US10261413B2Publication Date: 2019-04-16
- Inventor: Hirotaka Kitagawa , Yuichiro Goto
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2014-261756 20141225
- Main IPC: G03F7/00
- IPC: G03F7/00 ; C08F2/48 ; C08F214/18 ; H01L21/027 ; B41M5/00 ; C09D7/40 ; C08F2/44 ; C08F2/50 ; C08F220/22 ; C09D11/30 ; B41M7/00 ; C08F222/10 ; C08F220/18 ; C09D11/101 ; C09D11/102 ; G03F7/004 ; G03F7/027

Abstract:
Provided are a photocurable composition for imprints, having good releasability and temporal stability of the releasability, a pattern forming method, and a method for manufacturing a device. This photocurable composition for imprints includes a monofunctional chained aliphatic (meth)acrylate (A1) not containing a fluorine atom, a bifunctional or higher polyfunctional (meth)acrylate (A2) not containing a fluorine atom, a monofunctional (meth)acrylate (B) containing a fluorine atom, a photopolymerization initiator (C), and a non-polymerizable compound (D) having a polyoxyalkylene structure in a proportion of 1% to 5% by mass, in which the monofunctional chained aliphatic (meth)acrylate (A1) not containing a fluorine atom has a boiling point of 100° C. to 200° C. at a pressure of 0.67 kPa, and the monofunctional (meth)acrylate (B) containing a fluorine atom has a boiling point of 100° C. to 200° C. at a pressure of 0.67 kPa.
Public/Granted literature
- US20170285468A1 PHOTOCURABLE COMPOSITION FOR IMPRINTS, PATTERN FORMING METHOD, AND METHOD FOR MANUFACTURING DEVICE Public/Granted day:2017-10-05
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