Invention Grant
- Patent Title: System, method and computer program product for systematic and stochastic characterization of pattern defects identified from a semiconductor wafer
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Application No.: US15683631Application Date: 2017-08-22
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Publication No.: US10262408B2Publication Date: 2019-04-16
- Inventor: Allen Park , Moshe Preil , Andrew James Cross
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Zilka-Kotab, PC
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G06K9/62

Abstract:
A system, method, and computer program product are provided for systematic and stochastic characterization of pattern defects identified from a fabricated component. In use, a plurality of pattern defects detected from a fabricated component are identified. Additionally, attributes of each of the pattern defects are analyzed, based on predefined criteria. Further, a first set of pattern defects of the plurality of pattern defects are determined, from the analysis, to be systematic pattern defects, and a second set of pattern defects of the plurality of pattern defects are determined, from the analysis, to be stochastic pattern defects. Moreover, a first action is performed for the determined systematic pattern defects and a second action is performed for the determined stochastic pattern defects.
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