Invention Grant
- Patent Title: MEMS microphone with improved sensitivity
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Application No.: US15554647Application Date: 2015-03-24
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Publication No.: US10264363B2Publication Date: 2019-04-16
- Inventor: Lei Zou , Gino Rocca
- Applicant: TDK Corporation
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Nixon Peabody LLP
- International Application: PCT/EP2015/056251 WO 20150324
- International Announcement: WO2016/150487 WO 20160929
- Main IPC: H04R19/04
- IPC: H04R19/04 ; H04R19/00 ; B81B7/00 ; H04R3/00

Abstract:
A MEMS microphone with an improved sensitivity, e.g., a reduced temperature dependence of the sensitivity. The microphone includes a MEMS capacitor, a charging circuit and a bias circuit. The bias circuit includes a closed loop control circuit and creates a bias voltage with a temperature dependence.
Public/Granted literature
- US20180041841A1 MEMS MICROPHONE WITH IMPROVED SENSITIVITY Public/Granted day:2018-02-08
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