Invention Grant
- Patent Title: Monolithically integrated three electrode CMUT device
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Application No.: US15103388Application Date: 2014-12-04
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Publication No.: US10265728B2Publication Date: 2019-04-23
- Inventor: Antonia Cornelia Van Rens , Alfons Wouter Groenland
- Applicant: KONINKLIJKE PHILIPS N.V.
- Applicant Address: NL Eindhoven
- Assignee: Koninklijke Philips N.V.
- Current Assignee: Koninklijke Philips N.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP13196881 20131212
- International Application: PCT/EP2014/076475 WO 20141204
- International Announcement: WO2015/086413 WO 20150618
- Main IPC: B06B1/02
- IPC: B06B1/02 ; A61B8/00

Abstract:
A capacitive micromachined ultrasonic transducer (CMUT) cell comprising three electrodes: a first electrode coupled to a cell membrane; a second electrode embedded into a cell floor opposing the first electrode and separated therefrom by a gas or vacuum cavity; and a third electrode opposing the second electrode on the cavity side, wherein a dielectric layer is sandwiched between the second electrode and the third electrode to create a capacitive relation between the second electrode and the third electrode. The three electrode CMUT cell provides an ultrasound transducer with two actively driven (controlled) electrodes.
Public/Granted literature
- US20160310992A1 MONOLITHICALLY INTEGRATED THREE ELECTRODE CMUT DEVICE Public/Granted day:2016-10-27
Information query
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