Liquid ejection head and method of manufacturing liquid ejection head
Abstract:
Liquid ejection head includes a substrate, a piezoelectric element provided on the substrate, an ejection port forming member provided on the substrate carrying the piezoelectric element. The ejection port forming member has an ejection port and forms a pressure chamber with the substrate. A first thin film is arranged between the substrate and the piezoelectric element to produce a space between the substrate and the first thin film. A second thin film is arranged on the piezoelectric element. The first thin film is arranged so as not to contact the lateral (edge) surface of the piezoelectric element and has a higher rigidity than the second thin film.
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