Invention Grant
- Patent Title: MEMS device and process
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Application No.: US15414178Application Date: 2017-01-24
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Publication No.: US10266393B2Publication Date: 2019-04-23
- Inventor: Colin Wei Hong Chung , Scott Lyall Cargill , Colin Robert Jenkins
- Applicant: Cirrus Logic International Semiconductor Ltd.
- Applicant Address: US TX Austin
- Assignee: Cirrus Logic, Inc.
- Current Assignee: Cirrus Logic, Inc.
- Current Assignee Address: US TX Austin
- Agency: Jackson Walker L.L.P.
- Priority: GB1604309.3 20160314; GB1700944.0 20170119
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81C1/00 ; G01L9/00 ; H04R19/04 ; H04R19/00 ; H04R31/00 ; B81B3/00
Abstract:
The application describes MEMS transducers having a vent structure provided in a flexible membrane of the vent structure The vent structure comprises at least one moveable portion and the vent structure is configured such that, in response to a differential pressure across the vent structure, the moveable portion is rotatable about first and second axes of rotation, which axes of rotation extend in the plane of the membrane.
Public/Granted literature
- US20170217761A1 MEMS DEVICE AND PROCESS Public/Granted day:2017-08-03
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