Invention Grant
- Patent Title: Manufacturing apparatus of light-emitting element
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Application No.: US15599788Application Date: 2017-05-19
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Publication No.: US10269597B2Publication Date: 2019-04-23
- Inventor: Takaaki Ishikawa , Takaaki Kamimura , Noriyuki Hirata
- Applicant: Japan Display Inc.
- Applicant Address: JP Tokyo
- Assignee: Japan Display Inc.
- Current Assignee: Japan Display Inc.
- Current Assignee Address: JP Tokyo
- Agency: Typha IP LLC
- Priority: JP2016-115945 20160610
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L51/50 ; H01L51/00 ; H01L21/677 ; G05B19/418 ; H01L51/56

Abstract:
Disclosed is a manufacturing apparatus of a light-emitting element. The manufacturing apparatus includes: a main transporting route including a first transfer device and a second transfer device connected to each other through a first transporting chamber; a sub-transporting route extending in a direction intersecting the main transporting route, the sub-transporting route including: a second transporting chamber connected to the first transfer device or the second transfer device; and a delivery chamber connected to the second transporting chamber; and a plurality of treatment chambers connected to the delivery chamber. A region to which the first transfer device, the second transfer device, the first transporting chamber, and the second transporting chamber are connected is under a continuous vacuum environment.
Public/Granted literature
- US20170358469A1 MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF LIGHT-EMITTING ELEMENT Public/Granted day:2017-12-14
Information query
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