Invention Grant
- Patent Title: Processing system and processing program
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Application No.: US15387505Application Date: 2016-12-21
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Publication No.: US10269605B2Publication Date: 2019-04-23
- Inventor: Gaku Ikeda
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Priority: JP2015-251542 20151224
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G05B19/418 ; H01L21/677

Abstract:
A processing system includes a setting unit and a selection control unit. The setting unit is configured to set as a recipe a sequence of processing a plurality of target objects, which is unloaded from a load port, through a same transfer route and returning processed target objects to the load port. The selection control unit is configured to select, when the processing includes a recursive processing in which a target object is loaded multiples times into at least one of a plurality of process modules, an unloading start timing of a next target object from the load port based on at least one of a processing state and a transfer state of a rate-limiting process module among the respective process modules.
Public/Granted literature
- US20170185077A1 PROCESSING SYSTEM AND PROCESSING PROGRAM Public/Granted day:2017-06-29
Information query
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