Processing system and processing program
Abstract:
A processing system includes a setting unit and a selection control unit. The setting unit is configured to set as a recipe a sequence of processing a plurality of target objects, which is unloaded from a load port, through a same transfer route and returning processed target objects to the load port. The selection control unit is configured to select, when the processing includes a recursive processing in which a target object is loaded multiples times into at least one of a plurality of process modules, an unloading start timing of a next target object from the load port based on at least one of a processing state and a transfer state of a rate-limiting process module among the respective process modules.
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