Invention Grant
- Patent Title: Pillar-shaped semiconductor memory device and method for producing the same
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Application No.: US15729040Application Date: 2017-10-10
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Publication No.: US10269809B2Publication Date: 2019-04-23
- Inventor: Fujio Masuoka , Nozomu Harada
- Applicant: Unisantis Electronics Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Brinks Gilson & Lione
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L23/522 ; H01L23/528 ; H01L29/423 ; H01L29/786 ; H01L29/45 ; H01L29/49 ; H01L29/78

Abstract:
An SRAM includes two Si pillars on a substrate. In the Si pillars, inverter circuits are formed. The inverter circuits include drive N-channel SGTs each including first and second N+ layers functioning as a source and a drain, and load SGTs each including first and second P+ layers functioning as a source and a drain. Selection SGTs each including third and fourth N+ layers functioning as a source and a drain are formed above SiO2 layers disposed above the inverter circuits. The first N+ layer is connected to a ground wiring metal layer. The first P+ layers are connected to a power supply wiring metal layer through a NiSi layer. Gate TiN layers are connected to a word-line wiring metal layer through a NiSi layer. The third N+ layers are connected to an inverted bit-line wiring metal layer and a bit-line wiring metal layer.
Public/Granted literature
- US20180033792A1 PILLAR-SHAPED SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR PRODUCING THE SAME Public/Granted day:2018-02-01
Information query
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