Invention Grant
- Patent Title: Germanium-silicon light sensing apparatus
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Application No.: US15895932Application Date: 2018-02-13
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Publication No.: US10269838B2Publication Date: 2019-04-23
- Inventor: Yun-Chung Na , Szu-Lin Cheng , Shu-Lu Chen , Han-Din Liu , Hui-Wen Chen , Che-Fu Liang
- Applicant: Artilux Corporation
- Applicant Address: KY
- Assignee: Artilux Corporation
- Current Assignee: Artilux Corporation
- Current Assignee Address: KY
- Agency: Fish & Richardson P.C.
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L31/0312 ; H01L31/09 ; H01L31/18 ; H01L31/0232

Abstract:
A method for fabricating an image sensor array having a first group of photodiodes for detecting light at visible wavelengths a second group of photodiodes for detecting light at infrared or near-infrared wavelengths, the method including forming a germanium-silicon layer for the second group of photodiodes on a first semiconductor donor wafer; defining a first interconnect layer on the germanium-silicon layer; defining integrated circuitry for controlling pixels of the image sensor array on a semiconductor carrier wafer; defining a second interconnect layer on the semiconductor carrier wafer; bonding the first interconnect layer with the second interconnect layer; defining the pixels of an image sensor array on a second semiconductor donor wafer; defining a third interconnect layer on the image sensor array; and bonding the third interconnect layer with the germanium-silicon layer.
Public/Granted literature
- US20180175084A1 GERMANIUM-SILICON LIGHT SENSING APPARATUS Public/Granted day:2018-06-21
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