Invention Grant
- Patent Title: Semiconductor micro-analysis chip and method of manufacturing the same
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Application No.: US14198425Application Date: 2014-03-05
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Publication No.: US10279348B2Publication Date: 2019-05-07
- Inventor: Hiroko Miki , Hideto Furuyama , Kentaro Kobayashi , Akihiro Kojima
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Agency: Holtz, Holtz & Volek PC
- Priority: JP2013-167649 20130812
- Main IPC: B01D57/02
- IPC: B01D57/02 ; B01D61/46 ; B01L3/00 ; G01N15/10 ; G01N15/14 ; G01N15/00

Abstract:
One of embodiments is a semiconductor micro-analysis chip for detecting particles in a sample liquid. The chip comprises a semiconductor substrate, a first flow channel provided on the semiconductor substrate to allow the sample liquid to flow therein, a second flow channel provided at a different position from the first flow channel of the semiconductor substrate to allow the sample liquid or an electrolyte solution to flow therein, a contact portion where a portion of the first flow channel and a portion of the second flow channel abut each other or intersect one another with a partition being arranged between the flow channels, and a fine hole provided on the partition of the contact portion to allow the particles to pass therethrough.
Public/Granted literature
- US20150041316A1 SEMICONDUCTOR MICRO-ANALYSIS CHIP AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2015-02-12
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