Invention Grant
- Patent Title: Uniform fluid manifold for acoustic transducer
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Application No.: US15723139Application Date: 2017-10-02
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Publication No.: US10279379B2Publication Date: 2019-05-07
- Inventor: Mark J. Beck , Eric G. Liebscher
- Applicant: Product Systems Incorporated
- Applicant Address: US CA Campbell
- Assignee: Product Systems Incorporated
- Current Assignee: Product Systems Incorporated
- Current Assignee Address: US CA Campbell
- Agent Donald J. Pagel
- Main IPC: B08B3/12
- IPC: B08B3/12 ; H01L21/67

Abstract:
A fluid manifold comprised of a manifold adapted to deliver fluid directly into a gap formed between a surface of a substrate and an acoustic transducer. The fluid is delivered into the gap at a variable rate along a length of the manifold. Preferably, the manifold includes a plurality of apertures positioned along the length of the manifold for dispensing the fluid into the gap at the variable rate.
Public/Granted literature
- US20180021821A1 UNIFORM FLUID MANIFOLD FOR ACOUSTIC TRANSDUCER Public/Granted day:2018-01-25
Information query
IPC分类: