Invention Grant
- Patent Title: Method for manufacturing structure
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Application No.: US15601943Application Date: 2017-05-22
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Publication No.: US10279589B2Publication Date: 2019-05-07
- Inventor: Manabu Otsuka , Tetsushi Ishikawa , Yasuaki Tominaga , Tamaki Sato
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A. Inc., IP Division
- Priority: JP2016-106457 20160527
- Main IPC: B41J2/01
- IPC: B41J2/01 ; G03F7/38 ; B41J2/16 ; B41J2/14

Abstract:
A method for manufacturing a structure includes, preparing a substrate with a recessed portion provided therein, attaching a film including a photosensitive resin layer containing photosensitive resin therein and a support layer to the substrate to cover the recessed portion with the photosensitive resin layer, irradiating the photosensitive resin layer covering the recessed portion with light via the support layer to form a latent image pattern on the photosensitive resin layer, heating the photosensitive resin layer at 30 degrees Celsius or higher and X degrees Celsius or lower for one minute or longer, wherein a softening point of the photosensitive resin is X degrees Celsius (X≥30), separating the support layer from the photosensitive resin layer, heating the photosensitive resin layer at X+10 degrees Celsius or higher, and carrying out development on the photosensitive resin layer.
Public/Granted literature
- US20170341397A1 METHOD FOR MANUFACTURING STRUCTURE Public/Granted day:2017-11-30
Information query
IPC分类: