Invention Grant
- Patent Title: System with an increased surface density of microelectromechanical or nanoelectromechanical devices
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Application No.: US15389605Application Date: 2016-12-23
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Publication No.: US10280073B2Publication Date: 2019-05-07
- Inventor: Willy Ludurczak , Sebastien Hentz
- Applicant: Commissariat A L'Energie Atomique et aux Energies Alternatives
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1563325 20151224
- Main IPC: B81B7/02
- IPC: B81B7/02 ; B81C1/00 ; B81B7/04 ; H03H3/02

Abstract:
A nanoelectronic system comprised of n microelectromechanical or nanoelectromechanical devices arranged on a connection support to electrically connect the n devices, each device with an interaction area, at least one mechanical anchor and a first terminal, a second terminal and a third terminal, the relative arrangement of the first, second and third terminals, the anchor area and the interaction area being identical or similar for the n sensors, the first terminal of each device being intended to recover a signal emitted by each representative device of the interaction area state. At least part of the devices are arranged in such a way that the geometric location of the first terminal of one of the adjacent devices is identical to the geometric location of the first terminal of said other adjacent device, the first terminals being coincident.
Public/Granted literature
- US20170183221A1 SYSTEM WITH AN INCREASED SURFACE DENSITY OF MICROELECTROMECHANICAL OR NANOELECTROMECHANICAL DEVICES Public/Granted day:2017-06-29
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