In a process for carbonitriding metallic components (1), provision is made of at least one carburization phase (C1, C2), in which the metallic component (1) is carburized with a carbon-donating gas. In addition, provision is made of a nitriding phase (C1, C2, C3), which is assigned to the carburization phase (D1, D2) and precedes the carburization phase (D1, D2). Here, in the nitriding phase, the metallic component (1) is nitrided by means of a nitrogen-donating gas at least superficially at at least one surface region (4) of the metallic component (1). It is thereby possible to avoid an excessive concentration of carbon, and therefore component failure is prevented and it is possible to dispense with costly remachining steps, e.g. grinding.