Invention Grant
- Patent Title: Nozzle head and apparatus for coating substrate surface
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Application No.: US15533825Application Date: 2015-12-21
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Publication No.: US10280508B2Publication Date: 2019-05-07
- Inventor: Pekka Soininen , Olli Pekonen
- Applicant: BENEQ OY
- Applicant Address: FI Espoo
- Assignee: BENEQ OY
- Current Assignee: BENEQ OY
- Current Assignee Address: FI Espoo
- Agency: Carter, DeLuca & Farrell LLP
- Agent Robert P. Michal, Esq.
- Priority: FI20146132 20141222
- International Application: PCT/FI2015/050923 WO 20151221
- International Announcement: WO2016/102771 WO 20160630
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/54 ; C30B25/14 ; H01L21/67 ; H01L21/68
Abstract:
A nozzle head, apparatus and method for providing a coating on a surface of a substrate by subjecting the surface of the substrate to successive surface reactions of at least two precursors according to principles of atomic layer deposition. The nozzle head comprises an output face provided with at least two different precursor zones, the at least two different precursor zones being arranged to provide different coating layers on the surface of the substrate.
Public/Granted literature
- US20170362706A1 NOZZLE HEAD AND APPARATUS FOR COATING SUBSTRATE SURFACE Public/Granted day:2017-12-21
Information query
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