Invention Grant
- Patent Title: Apparatus for producing a single crystal of a metal oxide comprising a Pt-Rh alloy heater coated with zirconia
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Application No.: US15866952Application Date: 2018-01-10
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Publication No.: US10280530B2Publication Date: 2019-05-07
- Inventor: Keigo Hoshikawa , Yasuyuki Fujiwara , Keiichi Kohama , Shinji Nakanishi , Takumi Kobayashi , Etsuko Ohba
- Applicant: FUJIKOSHI MACHINERY CORP. , SHINSHU UNIVERSITY
- Applicant Address: JP Nagano JP Nagano
- Assignee: FUJIKOSHI MACHINERY CORP.,SHINSHU UNIVERSITY
- Current Assignee: FUJIKOSHI MACHINERY CORP.,SHINSHU UNIVERSITY
- Current Assignee Address: JP Nagano JP Nagano
- Agency: Stites & Harbison PLLC
- Agent Stephen J. Weyer
- Priority: JP2017-039286 20170302
- Main IPC: C30B11/00
- IPC: C30B11/00 ; C22C5/04 ; C30B29/30 ; C30B29/16

Abstract:
To provide a single crystal production apparatus that is capable of prolonging the lifetime of a heater, and capable of reducing the cost. A single crystal production apparatus of the present invention is the single crystal production apparatus which produces a single crystal of a metal oxide in an oxidative atmosphere, containing: a base body; a cylindrical furnace body having heat resistance disposed above the base body; a lid member occluding the furnace body; a heater disposed inside the furnace body; a high frequency coil heating the heater through high frequency induction heating; and a crucible heated with the heater, the heater containing a Pt-based alloy and having a zirconia coating on an overall surface of the heater.
Public/Granted literature
- US20180251908A1 SINGLE CRYSTAL PRODUCTION APPARATUS Public/Granted day:2018-09-06
Information query
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