- Patent Title: Cryopump system, method of operating the same, and compressor unit
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Application No.: US14206559Application Date: 2014-03-12
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Publication No.: US10280913B2Publication Date: 2019-05-07
- Inventor: Takaaki Matsui
- Applicant: Sumitomo Heavy Industries, Ltd.
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO HEAVY INDUSTRIES, LTD.
- Current Assignee: SUMITOMO HEAVY INDUSTRIES, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Michael Best & Friedrich LLP
- Priority: JP2013-049490 20130312
- Main IPC: F04B37/08
- IPC: F04B37/08 ; F04B1/26

Abstract:
A cryopump system includes a cryopump, a compressor of a working gas for the cryopump, a control device configured to control an operation frequency of the compressor, a gas line connecting the cryopump and the compressor, and a gas quantity adjustment unit configured to switch a working gas quantity of the gas line between at least a first gas quantity and a second gas quantity. When the gas line has the first gas quantity, a controllable range of the operation frequency provides a first flow rate range of the working gas. When the gas line has the second gas quantity, the controllable range provides a second flow rate range of the working gas. The second flow rate range has a non-overlapping portion with the first flow rate range.
Public/Granted literature
- US20140260339A1 CRYOPUMP SYSTEM, METHOD OF OPERATING THE SAME, AND COMPRESSOR UNIT Public/Granted day:2014-09-18
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