Invention Grant
- Patent Title: Vacuum pump component, siegbahn type exhaust mechanism and compound vacuum pump
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Application No.: US15037545Application Date: 2014-10-03
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Publication No.: US10280937B2Publication Date: 2019-05-07
- Inventor: Manabu Nonaka , Takashi Kabasawa
- Applicant: Edwards Japan Limited
- Applicant Address: JP Chiba
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Chiba
- Agency: Westman, Champlin & Koehler, P.A.
- Agent Theodore M. Magee
- Priority: JP2013-245684 20131128
- International Application: PCT/JP2014/076499 WO 20141003
- International Announcement: WO2015/079801 WO 20150604
- Main IPC: F04D29/44
- IPC: F04D29/44 ; F04D17/12 ; F04D17/16 ; F04D19/04 ; F04D29/28 ; F04D29/32 ; F04D29/52
Abstract:
A vacuum pump component includes a stationary disk that is formed with a spiral groove (helical groove) having a ridge portion and a valley part and has a projecting (protruding) portion on both or either one of an inner-diameter portion of the disk which faces a rotary cylinder (rotator cylinder-shaped portion) and an inner-diameter side of a stationary cylinder disposed on an outer peripheral side of the stationary disk. A second vacuum pump component includes rotary disk formed with a spiral groove having a ridge portion and a valley part and having a projecting (protruding) portion on both or either one of an outer-diameter portion of a rotary cylinder disposed on an inner peripheral side of the rotary disk and an outer-diameter portion of the rotary disk which faces a spacer.
Public/Granted literature
- US20160298645A1 Vacuum Pump Component, Siegbahn Type Exhaust Mechanism and Compound Vacuum Pump Public/Granted day:2016-10-13
Information query
