Bellows support structure and slide table device
Abstract:
A support structure for a bellows attached to a slide table, and which is capable of expanding and contracting in a movement direction of the slide table, includes support members that support the bellows, shafts disposed substantially in parallel with the movement direction of the slide table, and bushes that support the support member so as to be capable of moving in the movement direction of the slide table with respect to the shafts. Fluid bearings are formed by supplying a fluid between the bushes and the shafts.
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