Invention Grant
- Patent Title: Device and method for estimating a flow of gas in an enclosure maintained at reduced pressure in relation to the gas
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Application No.: US14440264Application Date: 2013-11-06
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Publication No.: US10281304B2Publication Date: 2019-05-07
- Inventor: Arnaud Leroy , Stephane Cros
- Applicant: Commissariat a l'energie atomique et aux energies alternatives
- Applicant Address: FR Paris
- Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1260532 20121106
- International Application: PCT/EP2013/073162 WO 20131106
- International Announcement: WO2014/072339 WO 20140515
- Main IPC: G01F1/50
- IPC: G01F1/50 ; G01N15/08

Abstract:
Method for estimating a gas flow in an enclosure maintained in a low pressure regimen relative to the gas, including: measuring, as a function of time, a gas flow Jmeasurement in the enclosure, and estimating values of the parameters A and B iteratively implemented by decreasing an estimation error based on a difference between Jestim(t) and Jmeasurement, and wherein, when Jmeasurement corresponds to a pressure rise of the gas in the enclosure, Jestim(t) is calculated according to the equation: J estim ( t ) = 2 A ∑ n = 1 n ma x ( B π ( t - OffX ) ) 1 2 exp ( - 2 ( n + 1 ) 2 4 B ( t - OffX ) ) + OffY and when Jmeasurement corresponds to a pressure decrease of the gas in the enclosure, Jestim(t) is calculated according to the equation: J estm ( t ) = P init - 2 A ∑ n = 1 n ma x ( B π ( t - OffX ) ) 1 2 exp ( - ( 2 n + 1 ) 2 4 B ( t - OffX ) ) + OffY FIG. 1.
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