Invention Grant
- Patent Title: Pressure sensor and manufacture method thereof
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Application No.: US15678822Application Date: 2017-08-16
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Publication No.: US10281350B2Publication Date: 2019-05-07
- Inventor: Li-Tien Tseng
- Applicant: MiraMEMS Sensing Technology Co., Ltd.
- Applicant Address: CN Suzhou
- Assignee: MIRAMEMS SENSING TECHNOLOGY CO., LTD.
- Current Assignee: MIRAMEMS SENSING TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Suzhou
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: CN201610679877 20160817
- Main IPC: G01L9/02
- IPC: G01L9/02 ; G01L19/14

Abstract:
A pressure sensor includes a bearing region and a frame which is spatially separated from the bearing region, wherein a sensing element of the pressure sensor is produced on the bearing region. When the aforementioned pressure sensor is mounted on a package substrate, the stress from the package substrate or a circuit board can be isolated by a space between the bearing region and the frame to avoid unexpected deformation on the sensing element.
Public/Granted literature
- US20180052067A1 PRESSURE SENSOR AND MANUFACTURE METHOD THEREOF Public/Granted day:2018-02-22
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