Invention Grant
- Patent Title: Microelectromechanical accelerometer device
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Application No.: US15275640Application Date: 2016-09-26
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Publication No.: US10281486B2Publication Date: 2019-05-07
- Inventor: Matti Liukku , Severi Niskanen
- Applicant: MURATA MANUFACTURING CO., LTD.
- Applicant Address: JP Nagaokakyo-Shi, Kyoto
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo-Shi, Kyoto
- Agency: Squire Patton Boggs (US) LLP
- Priority: FI20155684 20150925
- Main IPC: G01P15/18
- IPC: G01P15/18 ; G01P15/125 ; G01P15/08

Abstract:
The structure enables two-directional sensing of accelerations with compact component dimensions and with minimal cross-axis sensitivity. The rotation mass includes a first frame and a second frame. In one sense direction, the structure employs a combined proof mass of the first frame and the second frame, which improves the signal to noise level achievable with said device dimensions. In the other sense direction, a detection structure with at least two sensing elements is used to detect displacements of the proof mass of the second frame. Due to the specific internal configuration of the detection structure, signal contributions of the sensing elements in the one direction cancel each other.
Public/Granted literature
- US20170089946A1 MICROELECTROMECHANICAL ACCELEROMETER DEVICE Public/Granted day:2017-03-30
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