Invention Grant
- Patent Title: System for thermal management of device under test (DUT)
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Application No.: US15367415Application Date: 2016-12-02
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Publication No.: US10281521B2Publication Date: 2019-05-07
- Inventor: David Won-jun Song , James R. Hastings , Akhilesh P. Rallabandi , Morten S. Jensen , Christopher Wade Ackerman , Christopher R. Schroeder , Nader N. Abazarnia , John C. Johnson
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: G01R31/10
- IPC: G01R31/10 ; G01R31/28 ; H05B6/10

Abstract:
Techniques for thermal management of a device under test are discussed. In an example, an apparatus may include a pedestal having a device-specific surface configured to exchange heat with the integrated circuit while the device-specific surface is in contact with a surface of the integrated circuit or separated from the surface of the integrated circuit by a layer of thermally conductive material, and a heat generating element configured to heat the device-specific surface. In certain examples, the pedestal may include a plurality of channels configured to couple to a manifold and to route thermal material from the manifold through an interior of the pedestal for maintaining temperature control of the surface of an integrated circuit under test.
Public/Granted literature
- US20180156863A1 SYSTEM FOR THERMAL MANAGEMENT OF DEVICE UNDER TEST (DUT) Public/Granted day:2018-06-07
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