Device support structures from bulk substrates
Abstract:
A substrate is composed of a first material. A photonic structure is composed of the first material connected to one or more support structures composed of the first material between the photonic structure and a surface of the substrate, with at least one of the support structures supporting a first section of a strip of the photonic structure. The first section has a width that is wider than a width of a second section of the strip and has a length that is at least about twice the width of the second section of the strip.
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