Invention Grant
- Patent Title: High-resolution scanning microscopy
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Application No.: US14457856Application Date: 2014-08-12
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Publication No.: US10281701B2Publication Date: 2019-05-07
- Inventor: Ingo Kleppe , Yauheni Novikau , Ralf Netz , Michael Golles , Gunther Lorenz , Christoph Nieten
- Applicant: Carl Zeiss Microscopy GmbH
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Duane Morris LLP
- Priority: DE102013013793 20130815; DE102013019348 20131115
- Main IPC: G02B21/00
- IPC: G02B21/00 ; G02B21/02 ; G02B21/18 ; G02B21/36 ; G02B6/06 ; G02B26/08

Abstract:
Microscope and method for high resolution scanning microscopy of a sample, wherein the sample is illuminated; at least one point spot or line spot, which is guided in a scanning manner over the sample, is imaged into a still image; wherein the spot is imaged in a diffraction limited manner into the still image with magnification, and the still image lies still in a plane of detection; the still image is detected for different scan positions with a spatial resolution, which, taking into consideration the magnification, is at least twice as high as a full width at half maximum of the diffraction-limited still image, so that a diffraction pattern of the still image is detected; the diffraction pattern of the still image is evaluated for each scan position, and an image of the sample is generated that has a resolution that is increased beyond the diffraction limit, wherein a detector array is provided that has pixels and is larger than the still image; and radiation of the still image from the plane of detection is redistributed in a non-imaging manner among the pixels of the detector array; wherein at least two redistribution elements are provided that are exposed in parallel to the detection light, and wherein the detection light is different at least partially with respect to its spectral composition, and the radiation from the at least two redistribution elements reaches the pixels of a detector array.
Public/Granted literature
- US20150085099A1 High-Resolution Scanning Microscopy Public/Granted day:2015-03-26
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