Invention Grant
- Patent Title: System and method for electrowetting display device including pixels with self-aligned IGZO transistors
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Application No.: US15197606Application Date: 2016-06-29
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Publication No.: US10281713B1Publication Date: 2019-05-07
- Inventor: Abhishek Kumar , Toru Sakai
- Applicant: Amazon Technologies, Inc.
- Applicant Address: US WA Seattle
- Assignee: AMAZON TECHNOLOGIES, INC.
- Current Assignee: AMAZON TECHNOLOGIES, INC.
- Current Assignee Address: US WA Seattle
- Agency: Quarles and Brady LLP
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02F1/153 ; H01L29/24 ; H01L29/786 ; H01L27/12 ; H01L29/66 ; H01L21/02 ; H01L21/385

Abstract:
A display device and a method for making the same are provided. In the method, source and drain contacts are patterned on a buffer layer. An IGZO layer is depositing over at least a portion of the source contact and a portion of the drain contact. A gate structure is formed over the IGZO layer. A silicon nitride layer is deposited over the gate structure and the IGZO layer to form a first doped region in the IGZO layer and a second doped region in the IGZO layer. A pixel electrode is formed over the buffer layer. A plurality of pixel walls are formed over the buffer layer, the plurality of pixel walls being associated with an electrowetting pixel and the pixel electrode being configured to a apply voltage within the electrowetting pixel. At least one of the source contact and the drain contact is connected to the pixel electrode.
Information query