Invention Grant
- Patent Title: Scanning MEMS reflector system
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Application No.: US15682949Application Date: 2017-08-22
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Publication No.: US10281718B2Publication Date: 2019-05-07
- Inventor: Altti Torkkeli
- Applicant: MURATA MANUFACTURING CO., LTD.
- Applicant Address: JP Nagaokakyo-Shi, Kyoto
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo-Shi, Kyoto
- Agency: Squire Patton Boggs (US) LLP
- Priority: FI20165626 20160824
- Main IPC: G02B26/10
- IPC: G02B26/10 ; G02B26/08 ; G01S7/481

Abstract:
The actuation range obtained with a bending piezoelectric actuator in MEMS mirror system is mechanically amplified by fixing the moving end of the actuator to a suspender which suspends a reflector from a frame. The fixing point lies somewhere between the two ends of the suspender. The actuator and the suspender together form an actuator unit with a greater actuation range than one actuator can obtain by itself. In one embodiment, the suspender is a rigid lever. In another embodiment, the suspender is another bending actuator so that an additional increase in the actuation range can be obtained from the actuating movement of the second actuator.
Public/Granted literature
- US20180059406A1 SCANNING MEMS REFLECTOR SYSTEM Public/Granted day:2018-03-01
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