Invention Grant
- Patent Title: Optical MEMS scanning micro-mirror with anti-speckle cover
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Application No.: US15925527Application Date: 2018-03-19
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Publication No.: US10281734B2Publication Date: 2019-05-07
- Inventor: Lucio Kilcher , Nicolas Abele , Faouzi Khechana
- Applicant: North Inc.
- Applicant Address: CA Kitchener, Ontario
- Assignee: North Inc
- Current Assignee: North Inc
- Current Assignee Address: CA Kitchener, Ontario
- Agent Thomas Mahon
- Main IPC: G02B27/48
- IPC: G02B27/48 ; G03B21/28 ; G02B26/08 ; B81C1/00 ; G02B5/02 ; G02B26/10 ; H04N9/31

Abstract:
Optical MEMS scanning micro-mirror comprising: —a movable scanning micro-mirror (101), being pivotally connected to a MEMS body (102) substantially surrounding the lateral sides of the micro-mirror, —a transparent window (202) substantially covering the reflection side of the micro-mirror; —wherein a piezo-actuator assembly (500) and a layer of deformable transparent material (501) are provided on the outer portion of said window (202); —the piezo-actuator assembly (500) being arranged at the periphery of the layer of transparent material (501); —said piezo-actuator assembly (500) and transparent material (501) cooperating so that when actuated, the piezo-actuator assembly (500) causes micro-deformation of the transparent material (501), thereby providing an anti-speckle effect. The invention also provides the corresponding micro-projection system and method for reducing speckle.
Public/Granted literature
- US20180210224A1 OPTICAL MEMS SCANNING MICRO-MIRROR WITH ANTI-SPECKLE COVER Public/Granted day:2018-07-26
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