Invention Grant
- Patent Title: Reticle pod
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Application No.: US15651399Application Date: 2017-07-17
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Publication No.: US10281815B2Publication Date: 2019-05-07
- Inventor: Hsin-Min Hsueh , Chia-Ho Chuang , Cheng-Ju Lee , Jeng-Jie Huang
- Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD
- Applicant Address: TW New Taipei
- Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD.
- Current Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD.
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: G03F1/66
- IPC: G03F1/66 ; B65D25/10 ; B65D85/38 ; H01L21/673

Abstract:
A reticle pod for accommodating a reticle is provided. The reticle pod comprises a base; a cover; and at least one supporting member. When the reticle is accommodated on the reticle pod, the supporting member abuts against the reticle through a protrusion part; wherein the maximum static friction is constantly greater than a horizontal force applied to the support module from the reticle.
Public/Granted literature
- US20180210334A1 RETICLE POD Public/Granted day:2018-07-26
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