Invention Grant
- Patent Title: Vibration-assisted positioning stage
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Application No.: US15528695Application Date: 2015-12-16
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Publication No.: US10281829B2Publication Date: 2019-05-07
- Inventor: Chinedum E. Okwudire , Xin Dong
- Applicant: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
- Applicant Address: US MI Ann Arbor
- Assignee: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
- Current Assignee: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
- Current Assignee Address: US MI Ann Arbor
- Agency: Harness, Dickey & Pierce, P.L.C.
- International Application: PCT/US2015/066105 WO 20151216
- International Announcement: WO2016/106047 WO 20160630
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A vibration-assisted positioning stage comprising a stage, a roller bearing, an compliant joint interconnecting the roller bearing to the stage such that the compliant joint is sufficiently compliant in a direction of movement to permit reliable alignment of the stage and further permit dithering, and a dithering force actuator applying a dithering force directly to the roller bearing to permit the dithering of the stage. The dithering forces can be applied out of phase to minimize vibration of the stage. Furthermore, the controller of the stage can be employed to suppress any remnant vibrations of the stage due to dithering. A supervisory control system can intelligently adapt the parameters of the dithering signal to optimize the performance of the stage as friction changes.
Public/Granted literature
- US20170277041A1 VIBRATION-ASSISTED POSITIONING STAGE Public/Granted day:2017-09-28
Information query
IPC分类: