Finger print and pressure dual sensor and method of manufacturing the same
Abstract:
A finger print and pressure dual sensor includes first electrodes disposed on a substrate and extending in a first direction, and source electrodes and drain electrodes disposed to face each other in the first direction; channel regions disposed on the substrate and electrically connected to the source electrode and drain electrode; a first dielectric layer disposed on the substrate, covering the first electrodes, the source electrodes, and the drain electrodes and having first openings for exposing the channel region; second electrodes disposed on the first dielectric layer and extending in a second direction; a second dielectric layer disposed on the first dielectric layer, covering the second electrodes and having second openings for exposing the channel region; gate electrodes disposed on the second dielectric layer, extending in the second direction and disposed on the channel region; and a cover layer disposed on the second dielectric layer and covering the gate electrodes.
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