- Patent Title: Method and device for generating a plasma excited by a microwave energy in the electron cyclotron resonance (ECR) domain, in order to carry out a surface treatment or produce a coating around a filiform element
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Application No.: US15301001Application Date: 2015-03-26
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Publication No.: US10283322B2Publication Date: 2019-05-07
- Inventor: Patrick Choquet , David Duday , Olivier Blandenet , Thierry Leon Lagarde
- Applicant: H.E.F. , Luxembourg Institute of Science and Technology (LIST)
- Applicant Address: FR Andrezieux Boutheon LU Esch-sur-Alzette
- Assignee: H.E.F,LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- Current Assignee: H.E.F,LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- Current Assignee Address: FR Andrezieux Boutheon LU Esch-sur-Alzette
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Priority: FR1453000 20140404
- International Application: PCT/FR2015/050765 WO 20150326
- International Announcement: WO2015/150665 WO 20151008
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01J37/32 ; C23C16/511 ; C23F1/00 ; H01L21/306
Abstract:
According to the process, the filiform component is continuously linearly moved through magnetic dipoles arranged opposite each other and around a tube constituting a treatment chamber, and the microwave energy is introduced between at least two magnetic dipoles.
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