- Patent Title: Device, system and method for treatment of an object with plasma
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Application No.: US15347813Application Date: 2016-11-10
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Publication No.: US10283323B2Publication Date: 2019-05-07
- Inventor: Jörg Ehlbeck , Manfred Stieber , Jörg Stachowiak
- Applicant: Leibniz-Institut für Plasmaforschung und Technologie e.V.
- Applicant Address: DE Greifswald
- Assignee: Leibniz-Institut für Plasmaforschung und Technologie e.V.
- Current Assignee: Leibniz-Institut für Plasmaforschung und Technologie e.V.
- Current Assignee Address: DE Greifswald
- Agency: Soroker Agmon Nordman
- Main IPC: A61L2/14
- IPC: A61L2/14 ; H01J37/32 ; A23B5/015 ; A23B7/015 ; B65B55/04 ; H05H1/24

Abstract:
The device for treating an object with plasma comprises a jacket apparatus (10) which forms, or can form, a substantially gas-tight holding chamber (15) in which an object (1) to be treated can be accommodated. The device comprises a first electrode (20) and a second electrode (21), wherein the two electrodes (20, 21) are arranged with reference to the jacket apparatus (10) such that a plasma (2) can be generated in the holding chamber (15) of the jacket apparatus (10). A wall (13) of the jacket apparatus (10) forming the holding chamber (15) of the jacket apparatus (10) has a modulus of elasticity of Ew
Public/Granted literature
- US20170133205A1 DEVICE, SYSTEM AND METHOD FOR TREATMENT OF AN OBJECT WITH PLASMA Public/Granted day:2017-05-11
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