Invention Grant
- Patent Title: Method for assembling substrates by bonding indium phosphate surfaces
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Application No.: US15774122Application Date: 2016-11-07
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Publication No.: US10283364B2Publication Date: 2019-05-07
- Inventor: Bruno Imbert , Hubert Moriceau , Xavier Blot
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris FR Bernin
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,SOITEC
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,SOITEC
- Current Assignee Address: FR Paris FR Bernin
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1560721 20151109
- International Application: PCT/EP2016/076806 WO 20161107
- International Announcement: WO2017/080944 WO 20170518
- Main IPC: H01L21/46
- IPC: H01L21/46 ; H01L21/18 ; C09J5/02 ; C09J5/06 ; H01L23/00

Abstract:
The invention concerns an assembly method comprising the following steps: a) providing a first substrate comprising a first face made from crystalline indium phosphide, b) providing a second substrate comprising a second crystalline face different from the indium phosphide, c) forming an intermediate layer of crystalline indium phosphide on the second face of the second substrate, d) forming an assembly, via a direct bonding step, by bringing the first face of the first substrate into contact with the intermediate layer, the direct bonding step being carried out in an atmosphere having a pressure greater than 10−4 Pa, and preferably higher than 10−3 Pa, e) subjecting the assembly formed in step d) to heat treatment.
Public/Granted literature
- US20180330950A1 METHOD FOR ASSEMBLING SUBSTRATES BY BONDING INDIUM PHOSPHATE SURFACES Public/Granted day:2018-11-15
Information query
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