Invention Grant
- Patent Title: Method of processing workpiece
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Application No.: US15971592Application Date: 2018-05-04
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Publication No.: US10283410B2Publication Date: 2019-05-07
- Inventor: Kenji Takenouchi
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Disco Corporation
- Current Assignee: Disco Corporation
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JP2017-092985 20170509
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/78 ; H01L21/304 ; H01L21/683

Abstract:
A method of processing a workpiece with a cutting blade, the workpiece having a body of metal disposed in superposed relation to projected dicing lines, including: a first metal burr removing step of moving the cutting blade through first cut grooves while the cutting blade is positioned at such a height that a lowermost end of the cutting blade is lower than an upper end of the body of metal; and a second metal burr removing step of moving the cutting blade through the second cut grooves while the cutting blade is positioned at such a height that the lowermost end of the cutting blade is lower than the upper end of the body of metal. A liquid containing an organic acid and an oxidizing agent is supplied to the workpiece in the first metal burr removing step and the second metal burr removing step.
Public/Granted literature
- US20180330990A1 METHOD OF PROCESSING WORKPIECE Public/Granted day:2018-11-15
Information query
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