Invention Grant
- Patent Title: Vertical FETS with variable bottom spacer recess
-
Application No.: US15869761Application Date: 2018-01-12
-
Publication No.: US10283416B2Publication Date: 2019-05-07
- Inventor: Hari V. Mallela , Reinaldo A. Vega , Rajasekhar Venigalla
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/8238 ; H01L21/02 ; H01L21/32 ; H01L21/265 ; H01L29/423 ; H01L29/49 ; H01L29/786 ; H01L29/06

Abstract:
A method of forming a variable spacer in a vertical transistor device includes forming a first source/drain of a first transistor on a substrate; forming a second source/drain of a second transistor on the substrate adjacent to the first source/drain, an isolation region arranged in the substrate between the first source/drain and the second source/drain; depositing a spacer material on the first source/drain; depositing the spacer material on the second source/drain; forming a first channel extending from the first source drain and through the spacer material; forming a second channel extending from the second source/drain and through the spacer material; wherein the spacer material on the first source/drain forms a first spacer and the spacer material on the second source/drain forms a second spacer, the first spacer being different in thickness than the second spacer.
Public/Granted literature
- US20180138091A1 VERTICAL FETS WITH VARIABLE BOTTOM SPACER RECESS Public/Granted day:2018-05-17
Information query
IPC分类: