- Patent Title: Dummy gate used as interconnection and method of making the same
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Application No.: US15418996Application Date: 2017-01-30
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Publication No.: US10283505B2Publication Date: 2019-05-07
- Inventor: Wenhui Wang , Ryan Ryoung-han Kim , Linus Jang , Jason Cantone , Lei Sun , Seowoo Nam
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L27/092 ; H01L21/8238 ; H01L29/66 ; H01L29/06 ; H01L23/528 ; H01L21/02 ; H01L21/321 ; H01L27/02 ; H01L29/49

Abstract:
Process of using a dummy gate as an interconnection and a method of manufacturing the same are disclosed. Embodiments include forming on a semiconductor substrate dummy gate structures at cell boundaries, each dummy gate structure including a set of sidewall spacers and a cap disposed between the sidewall spacers; removing a first sidewall spacer or at least a portion of a first cap on a first side of a first dummy gate structure and forming a first gate contact trench over the first dummy gate structure; and filling the first gate contact trench with a metal to form a first gate contact.
Public/Granted literature
- US20170141110A1 DUMMY GATE USED AS INTERCONNECTION AND METHOD OF MAKING THE SAME Public/Granted day:2017-05-18
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