Invention Grant
- Patent Title: Three-dimensional memory device with annular blocking dielectrics and method of making thereof
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Application No.: US15804692Application Date: 2017-11-06
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Publication No.: US10283513B1Publication Date: 2019-05-07
- Inventor: Fei Zhou , Raghuveer S. Makala , Rahul Sharangpani , Adarsh Rajashekhar
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L27/11556 ; H01L21/8234 ; H01L21/8239 ; H01L27/11582 ; H01L21/768

Abstract:
A memory opening is formed through an alternating stack of insulating layers and sacrificial material layers located over a substrate. Annular recesses are formed around the memory opening by laterally recessing the sacrificial material layers with respect to the insulating layers. Annular metal portions are formed over recessed sidewalls of the sacrificial material layers within each of the annular recesses by a selective deposition process. Annular backside blocking dielectrics are formed selectively on inner sidewalls of the annular metal portions employing a layer of a self-assembly material that covers surfaces of the insulating layers and inhibits deposition of a dielectric material thereupon. A memory stack structure is formed in the memory opening, and the sacrificial material layers are replaced with electrically conductive layers. The annular backside blocking dielectrics provide electrical isolation for the annular metal portions, which function as control gate electrodes.
Public/Granted literature
- US20190139973A1 THREE-DIMENSIONAL MEMORY DEVICE WITH ANNULAR BLOCKING DIELECTRICS AND METHOD OF MAKING THEREOF Public/Granted day:2019-05-09
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