Invention Grant
- Patent Title: Three dimensional NAND string memory device
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Application No.: US14665103Application Date: 2015-03-23
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Publication No.: US10283519B2Publication Date: 2019-05-07
- Inventor: Erh-Kun Lai
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/04 ; H01L29/16 ; H01L29/24 ; H01L29/423 ; H01L29/792 ; H01L27/115 ; H01L21/31 ; H01L21/311 ; H01L21/306 ; H01L21/465 ; H01L21/469 ; H01L27/11582 ; H01L21/4757 ; H01L27/11565 ; H01L21/441 ; H01L21/28 ; H01L21/768

Abstract:
A memory device including a substrate, at least one first stacked structure and at least one second stacked structure disposed on the substrate is provided. The first stacked structure includes a plurality of alternately stacked metal layers and oxide layers. The second stacked structure is disposed adjacent to the first stacked structure and includes a plurality of alternately stacked semiconductor layers and oxide layers. The metal layers of the first stacked structure are connected to the semiconductor layers of the second stacked structure.
Public/Granted literature
- US20160284722A1 MEMORY DEVICE AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2016-09-29
Information query
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