Invention Grant
- Patent Title: Semiconductor device having vertical cell strings and a vertical common source line
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Application No.: US15631924Application Date: 2017-06-23
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Publication No.: US10283521B2Publication Date: 2019-05-07
- Inventor: Min Sik Jang
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si, Gyeonggi-do
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si, Gyeonggi-do
- Agency: William Park & Associates Ltd.
- Priority: KR10-2015-0015472 20150130
- Main IPC: H01L27/11551
- IPC: H01L27/11551 ; H01L27/11582 ; G11C16/04 ; H01L21/28 ; H01L23/528 ; H01L23/532 ; H01L27/1157 ; H01L29/10 ; H01L29/51 ; G11C16/08 ; G11C16/30 ; H01L21/02 ; H01L21/311

Abstract:
Disclosed are a semiconductor device and a manufacturing method thereof. The semiconductor device includes source select lines, word lines, drain select lines, and a bit line stacked on a substrate in which a first cell string region and a second cell string region are defined; channel layers and memory layers vertically passing through the source select lines, the word lines, and the drain select lines in each of the first cell string region and the second cell string region; and a common source line vertically passing through the source select lines, the word lines, and the drain select lines at centers of the first cell string region and the second cell string region, and extended to a lower side of the source select lines.
Public/Granted literature
- US20170287932A1 SEMICONDUCTOR DEVICE Public/Granted day:2017-10-05
Information query
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