Invention Grant
- Patent Title: Semiconductor memory device with first and second semicondutor films in first and second columnar bodies
-
Application No.: US15822604Application Date: 2017-11-27
-
Publication No.: US10283523B2Publication Date: 2019-05-07
- Inventor: Kotaro Noda
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: Toshiba Memory Corporation
- Current Assignee: Toshiba Memory Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11565 ; H01L29/792 ; H01L27/11575

Abstract:
A semiconductor memory device according to an embodiment comprises: conductive layers stacked in a vertical direction on a semiconductor substrate; and first and columnar bodies that extend in the vertical direction, the first and second columnar bodies each comprising: a first film; a second film disposed on the first film; and a semiconductor film, and the first film of the second columnar body having an upper end positioned higher than a first position lower than a first conductive layer and lower than a second position higher than the first conductive layer and a lower end positioned at or lower than the first position, and the second film of the second columnar body having an upper end positioned higher than the second position and a lower end positioned lower than the first position.
Public/Granted literature
- US20180083032A1 SEMICONDUCTOR MEMORY DEVICE WITH FIRST AND SECOND SEMICONDUTOR FILMS IN FIRST AND SECOND COLUMNAR BODIES Public/Granted day:2018-03-22
Information query
IPC分类: