Invention Grant
- Patent Title: Stacked image sensor having a barrier layer
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Application No.: US15395071Application Date: 2016-12-30
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Publication No.: US10283547B2Publication Date: 2019-05-07
- Inventor: U-Ting Chen , Shu-Ting Tsai , Cheng-Ying Ho , Tzu-Hsuan Hsu , Shih Pei Chou
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
An image sensor includes a sensor portion and an ASIC portion bonded to the sensor portion. The sensor portion includes a first substrate having radiation-sensing pixels, a first interconnect structure, a first isolation layer, and a first dielectric layer. The ASIC portion includes a second substrate, a second isolation layer, and a second dielectric layer. The material compositions of the first and second isolation layers and the first and second dielectric layers are configured such that the first and second isolation layers may serve as barrier layers to prevent copper diffusion into oxide. The first and second isolation layers may also serve as etching-stop layers in the formation of the image sensor.
Public/Granted literature
- US20170110497A1 Stacked Image Sensor Having a Barrier Layer Public/Granted day:2017-04-20
Information query
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