Invention Grant
- Patent Title: Resistive memory with a plurality of resistive random access memory cells each comprising a transistor and a resistive element
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Application No.: US15850400Application Date: 2017-12-21
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Publication No.: US10283565B1Publication Date: 2019-05-07
- Inventor: Peng Xu , Kangguo Cheng , Juntao Li , Choonghyun Lee
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Agent Vazken Alexanian
- Main IPC: H01L21/301
- IPC: H01L21/301 ; H01L27/24 ; H01L29/66 ; H01L45/00 ; H01L21/768 ; H01L29/78 ; H01L27/115

Abstract:
A method of forming a semiconductor structure includes forming a plurality of vertical field-effect transistors (VFETs) disposed on a substrate and forming a plurality of resistive elements disposed over top surfaces of the VFETs. Each pair of a given one of the plurality of VFETs and a corresponding resistive element disposed over the given VFET provides a resistive random access memory (ReRAM) cell. The VFETs are arranged in two or more columns and two or more rows, wherein each column of VFETs provides a bitline of the ReRAM cells sharing a bottom source/drain region and wherein each row of VFETs provides a wordline of the ReRAM cells sharing a gate. Top source/drain regions of the VFETs provide bottom contacts for the resistive elements disposed over the VFETs.
Information query
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